repair kit for semiconductor processing equipment comprising epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, and chemical mechanical polishers and cleaners, the kit sold as a unit for repair and/or maintenance of semiconductor wafer processing and production equipment for semiconductor substrates, thin films, silicon discs and wafers

'and/or':36 'chemic':10,23 'cleaner':27 'compris':7 'deposit':12,16 'disc':51 'epitaxi':8 'equip':6,44 'etcher':19 'film':49 'implant':21 'ion':20 'kit':2,29 'mainten':37 'mechan':24 'physic':14 'plasma':18 'polish':25 'process':5,41 'product':43 'reactor':9,13,17 'repair':1,35 'semiconductor':4,39,46 'silicon':50 'sold':30 'substrat':47 'thin':48 'unit':33 'vapor':11,15 'wafer':40,53

Maintenance and Repair of Semiconductor Processing and Production Equipment

'equip':9 'mainten':1 'process':6 'product':8 'repair':3 'semiconductor':5

CLEANCOAT

Owners

Goods & Services