sensor chips, sensor systems, devices, [and transmitters,] namely, relative humidity sensors, mass flow sensors, air flow sensors, gas flow sensors, differential pressure sensors, temperature sensors, liquid flow sensors, pressure sensors, gas sensors, [and radiation sensors; industrial process control software]

'air':15 'chip':2 'control':38 'devic':5 'differenti':21 'flow':13,16,19,27 'gas':18,31 'humid':10 'industri':36 'liquid':26 'mass':12 'name':8 'pressur':22,29 'process':37 'radiat':34 'relat':9 'sensor':1,3,11,14,17,20,23,25,28,30,32,35 'softwar':39 'system':4 'temperatur':24 'transmitt':7

[ research and ] development of sensor chips, sensor devices, sensor systems, [transmitters,] and control systems for others

'chip':6 'control':13 'develop':3 'devic':8 'other':16 'research':1 'sensor':5,7,9 'system':10,14 'transmitt':11

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