U.S. federal trademark · Serial No. 99244576 · Reg. No. 8360992
Apparatus and instruments for physics, namely, measuring devices for monitoring and measuring environmental conditions inside semiconductor processing chambers, including Chemical Mechanical Planarization (CMP) systems; Diagnostic equipment for research laboratory use, namely, pressure and temperature sensing wafers for measuring temperature, pressure, thermal profile, and chamber environmental conditions during semiconductor wafer processing; Measures for measuring pressure and temperature distribution, thermal profiles, and environmental characteristics within semiconductor process chambers; Computer software, recorded, for collecting, analyzing, and displaying pressure and temperature measurement data obtained during semiconductor processing; Computer software applications, downloadable, for collecting, analyzing, and displaying pressure and temperature measurement data obtained during semiconductor processing
Source: USPTO federal trademark records. Informational only, not legal advice. Status and details may lag the live USPTO database.