micro structures, namely sensors and actuators, all fabricated using photolithographic and LIGA processes

'actuat':6 'fabric':8 'liga':12 'micro':1 'name':3 'photolithograph':10 'process':13 'sensor':4 'structur':2 'use':9

technical consulting in the field of the design of micro structures

'consult':2 'design':8 'field':5 'micro':10 'structur':11 'technic':1

micro structures, namely pumps, valves, gears, manifolds, motors, machine parts, namely nozzles which are parts of power operated sprayers, all fabricated using photolithographic and LIGA processes

'fabric':21 'gear':6 'liga':25 'machin':9 'manifold':7 'micro':1 'motor':8 'name':3,11 'nozzl':12 'oper':18 'part':10,15 'photolithograph':23 'power':17 'process':26 'pump':4 'sprayer':19 'structur':2 'use':22 'valv':5

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