superconducting materials; namely, thin films of metals of metal cuprates on substrates and superconducting electronic circuits systems, subsystems, and devices; namely, superconducting quantum interference devices, bolometers, radio frequency filters, resonators, cavities, transmission lines, multi-chip modules, analog signal processors and digital signal processors, apparatus for fabricating thin film superconductors; namely, systems including chambers for depositing thin superconducting films by means of laser ablation or sputtering and instruments for use in fabricating or testing superconductors; namely, substrate heaters, target holders, and mutual inductance testers

'ablat':64 'analog':38 'apparatus':45 'bolomet':26 'caviti':31 'chamber':54 'chip':36 'circuit':16 'cuprat':10 'deposit':56 'devic':20,25 'digit':42 'electron':15 'fabric':47,72 'film':5,49,59 'filter':29 'frequenc':28 'heater':78 'holder':80 'includ':53 'induct':83 'instrument':68 'interfer':24 'laser':63 'line':33 'materi':2 'mean':61 'metal':7,9 'modul':37 'multi':35 'multi-chip':34 'mutual':82 'name':3,21,51,76 'processor':40,44 'quantum':23 'radio':27 'reson':30 'signal':39,43 'sputter':66 'substrat':12,77 'subsystem':18 'superconduct':1,14,22,58 'superconductor':50,75 'system':17,52 'target':79 'test':74 'tester':84 'thin':4,48,57 'transmiss':32 'use':70

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