U.S. federal trademark · Serial No. 79404432 · Reg. No. 7781355
Downloadable software for aggregating and combining measurement parameters of semiconductor wafers in the production of semiconductor devices; Downloadable software for analysing and interpreting in-situ and in-line measurement parameters before, during and after thin film deposition, thin film etching and other treatment and characterisation steps; Downloadable software for improving the yield and the stability of production processes and their analysis results for statistical process control in the production of semiconductor devices
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