thin film processing machines, wafer processing machines, etch technology processing machines, and deposition technology machines, all for the manufacture and processing of computer hardware, computer software, and computer components, namely, semiconductors, integrated circuits, and flat panel displays

'circuit':33 'compon':29 'comput':23,25,28 'deposit':13 'display':37 'etch':8 'film':2 'flat':35 'hardwar':24 'integr':32 'machin':4,7,11,15 'manufactur':19 'name':30 'panel':36 'process':3,6,10,21 'semiconductor':31 'softwar':26 'technolog':9,14 'thin':1 'wafer':5

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