U.S. federal trademark · Serial No. 85014833 · Reg. No. 4064126
Automatic wafer handler for transport of semiconductor wafers in a semiconductor wafer processing equipment and components thereof, namely, vacuum transport chamber with robotic wafer handling equipment for transporting wafers to and from semiconductor processing reactors, and parts and accessories thereof
Source: USPTO federal trademark records. Informational only, not legal advice. Status and details may lag the live USPTO database.