tracked transportation conveyor systems for use in clean rooms, the systems comprised of rail-guided, unmanned conveyor vehicles for carrying semiconductors and semiconductor parts in clean rooms, metal rails for the conveyor vehicles, and electrical controllers for the vehicles, the foregoing sold as a unit

'carri':21 'clean':8,27 'compris':12 'control':37 'conveyor':3,18,33 'electr':36 'forego':42 'guid':16 'metal':29 'part':25 'rail':15,30 'rail-guid':14 'room':9,28 'semiconductor':22,24 'sold':43 'system':4,11 'track':1 'transport':2 'unit':46 'unman':17 'use':6 'vehicl':19,34,40

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