CRYOTEMP

Owner

Goods & Services

Apparatus and instruments for physics, namely, in-situ semiconductor process temperature measurement wafers equipped with embedded electronic temperature sensors for monitoring wafer level thermal profiles inside semiconductor process chambers, particularly plasma etch chambers; Diagnostic equipment for research laboratory use, namely, temperature sensing wafers for measuring wafer temperature and environmental conditions during cryogenic plasma etch processes; Measures for measuring temperature distribution and thermal profiles within etch chambers; Computer software, recorded, for controlling, collecting, analyzing, and displaying cryogenic wafer temperature measurement data; Computer software applications, downloadable, for controlling, collecting, analyzing, and displaying cryogenic wafer temperature measurement data