Power controllers; Matching units that transmit power from a power source to a plasma process chamber, namely, impedance conversion electrical circuits for radio frequency power used for semiconductor manufacturing machines and systems

'chamber':16 'circuit':21 'control':2 'convers':19 'electr':20 'frequenc':24 'imped':18 'machin':30 'manufactur':29 'match':3 'name':17 'plasma':14 'power':1,7,10,25 'process':15 'radio':23 'semiconductor':28 'sourc':11 'system':32 'transmit':6 'unit':4 'use':26

Industrial Robots; Industrial workpiece handling robots; Industrial transfer robots; Electronic microwave generators used for semiconductor manufacturing machines and systems

'electron':10 'generat':12 'handl':5 'industri':1,3,7 'machin':17 'manufactur':16 'microwav':11 'robot':2,6,9 'semiconductor':15 'system':19 'transfer':8 'use':13 'workpiec':4

DAIHEN

Owners

Goods & Services