electronic instruments for use in remote inspection, measurement and processing of industrial components using remote visual devices, namely, air bearing stages, namely, motion control and positioning devices for use in automated inspection of semiconductors and other products with high-resolution microstructures, such as flat panel displays, semiconductor wafers and photovoltaic panels

'air':19 'autom':31 'bear':20 'compon':13 'control':24 'devic':17,27 'display':47 'electron':1 'flat':45 'high':40 'high-resolut':39 'industri':12 'inspect':7,32 'instrument':2 'measur':8 'microstructur':42 'motion':23 'name':18,22 'panel':46,52 'photovolta':51 'posit':26 'process':10 'product':37 'remot':6,15 'resolut':41 'semiconductor':34,48 'stage':21 'use':4,14,29 'visual':16 'wafer':49

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