repair and maintenance services for semiconductor wafer processing equipment

'equip':9 'mainten':3 'process':8 'repair':1 'semiconductor':6 'servic':4 'wafer':7

semiconductor wafer processing equipment and components, namely, epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanter, supporting frames therefor and computer programs for uses therewith

'chemic':10 'compon':6 'comput':26 'deposit':12,16 'epitaxi':8 'equip':4 'etcher':19 'frame':23 'implant':21 'ion':20 'name':7 'physic':14 'plasma':18 'process':3 'program':27 'reactor':9,13,17 'semiconductor':1 'support':22 'therefor':24 'therewith':30 'use':29 'vapor':11,15 'wafer':2

DCVD

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