Computer hardware and downloadable and prerecorded computer software for use in process control and yield management for the semiconductor, integrated circuit and related microelectronics manufacturing industries; computer hardware and downloadable and prerecorded computer software for testing, inspecting, characterizing, and predicting physical and electrical properties of semiconductors, integrated circuits, microelectronics, and wafers; computer hardware and downloadable and prerecorded computer software for use in detecting imperfections and faults in semiconductor electronic components, integrated circuits, microelectronics, and wafers

'character':38 'circuit':21,48,72 'compon':70 'comput':1,7,27,33,52,58 'control':13 'detect':63 'download':4,30,55 'electr':43 'electron':69 'fault':66 'hardwar':2,28,53 'imperfect':64 'industri':26 'inspect':37 'integr':20,47,71 'manag':16 'manufactur':25 'microelectron':24,49,73 'physic':41 'predict':40 'prerecord':6,32,57 'process':12 'properti':44 'relat':23 'semiconductor':19,46,68 'softwar':8,34,59 'test':36 'use':10,61 'wafer':51,75 'yield':15

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