Magnetic fluid rotary feedthrough system, namely, a rotating shaft incorporating magnetic fluid seal, bearings, integrated motor and sensors, for use in controlled rotation, indexing or positioning attached to a vacuum chamber as part of an integrated motion control system or semi-conductor processing operation in the field ion implantation, chemical vapor deposition, metal oxide chemical vapor deposition, deposition by sputtering, robotics and rotary handling mechanisms

'attach':27 'bear':14 'chamber':31 'chemic':51,56 'conductor':43 'control':22,38 'deposit':53,58,59 'feedthrough':4 'field':48 'fluid':2,12 'handl':65 'implant':50 'incorpor':10 'index':24 'integr':15,36 'ion':49 'magnet':1,11 'mechan':66 'metal':54 'motion':37 'motor':16 'name':6 'oper':45 'oxid':55 'part':33 'posit':26 'process':44 'robot':62 'rotari':3,64 'rotat':8,23 'seal':13 'semi':42 'semi-conductor':41 'sensor':18 'shaft':9 'sputter':61 'system':5,39 'use':20 'vacuum':30 'vapor':52,57

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