U.S. federal trademark · Serial No. 85018006 · Reg. No. 4210502
VACUUM PUMPS, SEMICONDUCTOR PROCESSING EQUIPMENT, NAMELY, VACUUM DESIGNED LOAD LOCKS FOR MANUFACTURED WAFERS, CARRIER MODULES, CHAMBERS, VACUUM MODULES FOR PLASMA ETCHING, VACUUM MODULES FOR PLASMA VAPOR DEPOSITION, VACUUM MODULES FOR PLASMA ENHANCED VAPOR DEPOSITION, CHEMICALLY POWERED ASSISTED ELECTROMECHANICAL PLASMA INDUCTION SYSTEMS, CHEMICALLY AND RF POWERED ASSISTED ELECTROMECHANICAL PLASMA INDUCTION SYSTEMS, VACUUM ENHANCED PROCESSING CHAMBERS; EQUIPMENT USED IN THE STORAGE AND TRANSPORTATION OF SEMICONDUCTOR SUBSTRATE MATERIALS, NAMELY, SMIF PODS, MASK PACKAGES, EUV PODS, WAFER CASSETTES, FRONT OPENING UNIFIED POD (FOUP) AND FRAMES
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