Automatic test equipment for testing electrical properties of semiconductor integrated circuits, Semiconductor test system consisting primarily of a computer as a man-machine interface and a main frame having a plurality of printed circuit boards for testing semiconductor integrated circuits, Memory tester for testing semiconductor memory integrated circuits, Logic tester for testing semiconductor logic integrated circuits

'automat':1 'board':36 'circuit':11,35,41,49,57 'comput':19 'consist':15 'electr':6 'equip':3 'frame':29 'integr':10,40,48,56 'interfac':25 'logic':50,55 'machin':24 'main':28 'man':23 'man-machin':22 'memori':42,47 'plural':32 'primarili':16 'print':34 'properti':7 'semiconductor':9,12,39,46,54 'system':14 'test':2,5,13,38,45,53 'tester':43,51

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