machines for manufacturing semiconductors; machines for manufacturing semiconductors, and their structured parts and fitting therefor; machines for manufacturing semiconductors and semiconductor manufacturing machine systems comprised of a vacuum chamber for accommodating semiconductor wafers, and machines for handling and transferring semiconductor wafers into and out of vacuum chambers; machines for the treatment of semiconductor wafers, namely, semiconductor wafer processing equipment; machines for manufacturing printed circuit boards for semiconductors

'accommod':31 'board':65 'chamber':29,47 'circuit':64 'compris':25 'equip':59 'fit':14 'handl':37 'machin':1,5,16,23,35,48,60 'manufactur':3,7,18,22,62 'name':55 'part':12 'print':63 'process':58 'semiconductor':4,8,19,21,32,40,53,56,67 'structur':11 'system':24 'therefor':15 'transfer':39 'treatment':51 'vacuum':28,46 'wafer':33,41,54,57

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