arc suppression system, namely a DC power supply which employs a voltage interruption or reversal feature in order to reduce energy or frequency of arcing between a sputter target and vacuum chamber housing the sputter target and an applicator connected to a microwave power supply located within the chamber in the vicinity of the target

'applic':39 'arc':1,25 'chamber':32,49 'connect':40 'dc':6 'employ':10 'energi':21 'featur':16 'frequenc':23 'hous':33 'interrupt':13 'locat':46 'microwav':43 'name':4 'order':18 'power':7,44 'reduc':20 'revers':15 'sputter':28,35 'suppli':8,45 'suppress':2 'system':3 'target':29,36,55 'vacuum':31 'vicin':52 'voltag':12 'within':47

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