instrumentation equipment, namely, electricity control panels and control mechanisms for machines, engines or motors; ozone generators; equipment used for processing wafers used for manufacturing semi-conductors [, and accessories therefor ]

'accessori':29 'conductor':27 'control':5,8 'electr':4 'engin':12 'equip':2,17 'generat':16 'instrument':1 'machin':11 'manufactur':24 'mechan':9 'motor':14 'name':3 'ozon':15 'panel':6 'process':20 'semi':26 'semi-conductor':25 'therefor':30 'use':18,22 'wafer':21

waste gas treatment units and waste gas cleaning units necessary for manufacturing semi-conductors [ ; ultrapure water system ]

'clean':8 'conductor':15 'gas':2,7 'manufactur':12 'necessari':10 'semi':14 'semi-conductor':13 'system':18 'treatment':3 'ultrapur':16 'unit':4,9 'wast':1,6 'water':17

EBARA

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