Optical defect inspection equipment in the nature of electron microscopes and electron beam apparatuses used for inspecting and analyzing electronic circuits integrated in or on substrates made of glass, semiconductors, or other dielectric materials

'analyz':19 'apparatus':14 'beam':13 'circuit':21 'defect':2 'dielectr':33 'electron':9,12,20 'equip':4 'glass':29 'inspect':3,17 'integr':22 'made':27 'materi':34 'microscop':10 'natur':7 'optic':1 'semiconductor':30 'substrat':26 'use':15

Machines for use in the manufacture of electrical and electronic circuitry

'circuitri':11 'electr':8 'electron':10 'machin':1 'manufactur':6 'use':3

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