industrial production machines for treating and processing semiconductor wafers, semiconductor substrates, flat panel displays and data disks, namely, automated multistation fluid processing machine systems for the manufacture of semiconductor wafers, semiconductor substrates, flat panel displays, and data disks comprising wafer handling machines, wafer chemical processing machines and related controllers sold as a unit

'autom':19 'chemic':44 'compris':39 'control':49 'data':16,37 'disk':17,38 'display':14,35 'flat':12,33 'fluid':21 'handl':41 'industri':1 'machin':3,23,42,46 'manufactur':27 'multist':20 'name':18 'panel':13,34 'process':7,22,45 'product':2 'relat':48 'semiconductor':8,10,29,31 'sold':50 'substrat':11,32 'system':24 'treat':5 'unit':53 'wafer':9,30,40,43

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