Semiconductor testing apparatus, namely, apparatus composed of frame, stage, semiconductors, source device, and detection device for detecting and measuring features and defects on manufactured articles in the nature of silicon, gallium arsenide, silicon carbide, sapphire, silicon-on-insulator, germanium, indium phosphide, gallium nitride, quartz, glass, laminate, copper clad laminate, and lithium niobate substrates

'apparatus':3,5 'arsenid':32 'articl':25 'carbid':34 'clad':49 'compos':6 'copper':48 'defect':22 'detect':14,17 'devic':12,15 'featur':20 'frame':8 'gallium':31,43 'germanium':40 'glass':46 'indium':41 'insul':39 'lamin':47,50 'lithium':52 'manufactur':24 'measur':19 'name':4 'natur':28 'niobat':53 'nitrid':44 'phosphid':42 'quartz':45 'sapphir':35 'semiconductor':1,10 'silicon':30,33,37 'silicon-on-insul':36 'sourc':11 'stage':9 'substrat':54 'test':2

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