wet, dry, thermal, and catalytic scrubbers for the treatment of gaseous and liquid effluents from semiconductor manufacturing processes

'catalyt':5 'dri':2 'effluent':14 'gaseous':11 'liquid':13 'manufactur':17 'process':18 'scrubber':6 'semiconductor':16 'thermal':3 'treatment':9 'wet':1

chemicals for carrying out wet, dry, thermal, and catalytic treatment of hazardous gases and liquids in the field of semiconductor wafer fabrication

'carri':3 'catalyt':9 'chemic':1 'dri':6 'fabric':22 'field':18 'gase':13 'hazard':12 'liquid':15 'semiconductor':20 'thermal':7 'treatment':10 'wafer':21 'wet':5

construction, installation, maintenance, and deinstallation of wet, dry, thermal, and catalytic scrubbers and scrubber chemicals for the treatment of gaseous and liquid effluents from semiconductor manufacturing processes

'catalyt':11 'chemic':15 'construct':1 'deinstal':5 'dri':8 'effluent':23 'gaseous':20 'instal':2 'liquid':22 'mainten':3 'manufactur':26 'process':27 'scrubber':12,14 'semiconductor':25 'thermal':9 'treatment':18 'wet':7

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