Construction, installation, maintenance, and deinstallation of wet, dry, thermal and catalytic scrubbers and scrubber chemicals for the treatment of gaseous and liquid effluents from semiconductor manufacturing processes

'catalyt':11 'chemic':15 'construct':1 'deinstal':5 'dri':8 'effluent':23 'gaseous':20 'instal':2 'liquid':22 'mainten':3 'manufactur':26 'process':27 'scrubber':12,14 'semiconductor':25 'thermal':9 'treatment':18 'wet':7

Chambers for use in the disposal of waste materials, namely, combustion chambers, gas purifiers, gas scrubbers, and wet, dry, thermal, and catalytic scrubbers all for disposing of gaseous and any residual liquid effluents from manufacturing processes

'catalyt':22 'chamber':1,12 'combust':11 'dispos':6,26 'dri':19 'effluent':33 'gas':13,15 'gaseous':28 'liquid':32 'manufactur':35 'materi':9 'name':10 'process':36 'purifi':14 'residu':31 'scrubber':16,23 'thermal':20 'use':3 'wast':8 'wet':18

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