Software-controlled, eco-efficient systems used in the semiconductor manufacturing industry, namely, for controlling, monitoring and analyzing data for semiconductor processing equipment including but not limited to sub-fab equipment in the form of hardware; Eco-efficient diagnostic semiconductor equipment in the form of computer hardware for the review and measurement of semiconductor elements in the nature of wafers, recticles, and flat panel displays

'analyz':19 'comput':49 'control':3,16 'data':20 'diagnost':42 'display':68 'eco':5,40 'eco-effici':4,39 'effici':6,41 'element':58 'equip':24,33,44 'fab':32 'flat':66 'form':36,47 'hardwar':38,50 'includ':25 'industri':13 'limit':28 'manufactur':12 'measur':55 'monitor':17 'name':14 'natur':61 'panel':67 'process':23 'recticl':64 'review':53 'semiconductor':11,22,43,57 'softwar':2 'software-control':1 'sub':31 'sub-fab':30 'system':7 'use':8 'wafer':63

Eco-efficient semiconductor wafer processing equipment

'eco':2 'eco-effici':1 'effici':3 'equip':7 'process':6 'semiconductor':4 'wafer':5

Eco-efficient semiconductor processing services, namely, providing temporary use of non-downloadable software in the field of eco-efficient semiconductor processing for controlling, monitoring and analyzing data for semiconductor processing equipment including but not limited to sub-fab equipment

'analyz':29 'control':26 'data':30 'download':14 'eco':2,21 'eco-effici':1,20 'effici':3,22 'equip':34,43 'fab':42 'field':18 'includ':35 'limit':38 'monitor':27 'name':7 'non':13 'non-download':12 'process':5,24,33 'provid':8 'semiconductor':4,23,32 'servic':6 'softwar':15 'sub':41 'sub-fab':40 'temporari':9 'use':10

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