Vacuum measuring apparatus, particularly, vacuum-pressure measuring apparatus with capacitive membrane for use in harsh manufacturing environments, including in CVD (chemical vapor deposition), PVD (physical vapor deposition) and other semiconductor production process

'apparatus':3,9 'capacit':11 'chemic':22 'cvd':21 'deposit':24,28 'environ':18 'harsh':16 'includ':19 'manufactur':17 'measur':2,8 'membran':12 'particular':4 'physic':26 'pressur':7 'process':33 'product':32 'pvd':25 'semiconductor':31 'use':14 'vacuum':1,6 'vacuum-pressur':5 'vapor':23,27

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