[ Scanning Electron Microscopes (SEM); ] computer programs for control of Nano Imprint Lithography (NIL) and Electron Beam Recorder (EBR) machines and tools

'beam':16 'comput':5 'control':8 'ebr':18 'electron':2,15 'imprint':11 'lithographi':12 'machin':19 'microscop':3 'nano':10 'nil':13 'program':6 'record':17 'scan':1 'sem':4 'tool':21

Hydraulic printing and embossing machines; machines for Nano Imprint Litography (NIL), Electron Beam Recorder (EBR) based lithography and printing plates; semiconductor manufacturing machines; semiconductor wafer processing machines and equipment; electronic integrated circuits manufacturing machines; machines for manufacturing recorded optical storage discs and/or recorded magnetic data carriers, storage discs and electronic memories; machines for manufacturing flat panel display screens, liquid crystal display screens and light emitting diode display screens; all intended for research and/or industrial purposes

'and/or':42,73 'base':16 'beam':13 'carrier':46 'circuit':32 'crystal':60 'data':45 'diod':66 'disc':41,48 'display':57,61,67 'ebr':15 'electron':12,30,50 'emboss':4 'emit':65 'equip':29 'flat':55 'hydraul':1 'imprint':9 'industri':74 'integr':31 'intend':70 'light':64 'liquid':59 'lithographi':17 'litographi':10 'machin':5,6,23,27,34,35,52 'magnet':44 'manufactur':22,33,37,54 'memori':51 'nano':8 'nil':11 'optic':39 'panel':56 'plate':20 'print':2,19 'process':26 'purpos':75 'record':14,38,43 'research':72 'screen':58,62,68 'semiconductor':21,24 'storag':40,47 'wafer':25

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