apparatus, instruments and machines for use in the manufacture of semi-conductors and semi-conductor wafers, namely etching machines, chemical vapor deposition machines and sputtering machines for depositing metal on a substrate

'apparatus':1 'chemic':22 'conductor':13,17 'deposit':24,30 'etch':20 'instrument':2 'machin':4,21,25,28 'manufactur':9 'metal':31 'name':19 'semi':12,16 'semi-conductor':11,15 'sputter':27 'substrat':34 'use':6 'vapor':23 'wafer':18

computer software for control of semiconductor fabrication machines, chemical deposition machines, sputtering machines and evaporation and vacuum processing machines

'chemic':9 'comput':1 'control':4 'deposit':10 'evapor':15 'fabric':7 'machin':8,11,13,19 'process':18 'semiconductor':6 'softwar':2 'sputter':12 'vacuum':17

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