U.S. federal trademark · Serial No. 87051351 · Reg. No. 5530784
equipment and machines for the processing and production of semiconductor substrates, thin films, silicon discs and wafers, namely, machines for polishing and cleaning semiconductor substrates, thin films, silicon discs, and wafers
[ Electronic measuring machines for measuring semiconductor substrates, thin films, silicon discs, and wafers, for use in the processing and production therefor; electronic process monitors for monitoring the production and processing of semiconductor substrates, thin films, silicon discs, and wafers ]
Source: USPTO federal trademark records. Informational only, not legal advice. Status and details may lag the live USPTO database.