metrology system for the analysis and determination of properties such as thickness and optical constants of films on samples such as semiconductor wafers using different optical technologies for film analysis such as Fourier Transform Infrared (FTIR), visible and ultraviolet (UV) reflectometry

'analysi':5,30 'constant':15 'determin':7 'differ':25 'film':17,29 'fourier':33 'ftir':36 'infrar':35 'metrolog':1 'optic':14,26 'properti':9 'reflectometri':41 'sampl':19 'semiconductor':22 'system':2 'technolog':27 'thick':12 'transform':34 'ultraviolet':39 'use':24 'uv':40 'visibl':37 'wafer':23

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