Software to analyze and interpret in-situ and in-line measurement parameters before, during and after thin layer deposition; software to control process deviations during thin layer deposition; software to improve yield and stability of production processes by correlating multi-measurement parameters and their analysis results for the statistical process control

'analysi':48 'analyz':3 'control':24,54 'correl':41 'deposit':21,30 'deviat':26 'improv':33 'in-lin':10 'in-situ':6 'interpret':5 'layer':20,29 'line':12 'measur':13,44 'multi':43 'multi-measur':42 'paramet':14,45 'process':25,39,53 'product':38 'result':49 'situ':8 'softwar':1,22,31 'stabil':36 'statist':52 'thin':19,28 'yield':34

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