Gas scrubbing apparatus, namely, dry toxic gas scrubbing apparatus, specifically, dry toxic gas scrubbing machines; waste gas processing systems comprised of gas scrubbers; gas scrubbing apparatus, namely machines to remove waste gases, for use with chemical vapour deposition reactors for manufacturing semi-and super-conductors

'apparatus':3,9,26 'chemic':36 'compris':20 'conductor':47 'deposit':38 'dri':5,11 'gas':1,7,13,17,22,24 'gase':32 'machin':15,28 'manufactur':41 'name':4,27 'process':18 'reactor':39 'remov':30 'scrub':2,8,14,25 'scrubber':23 'semi':43 'semi-and':42 'specif':10 'super':46 'super-conductor':45 'system':19 'toxic':6,12 'use':34 'vapour':37 'wast':16,31

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