U.S. federal trademark · Serial No. 79109901 · Reg. No. 4273920
Software, recorded programs and control programs for the control of electron beam lithography [ and photo lithography ] installations for the manufacture of semiconductors, integrated circuits and for nanotechnology
[ Development of software and control programs for the control of electron beam lithography and photo lithography installations for the manufacture of semiconductors, integrated circuits and for nanotechnology ]
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