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Electronic components, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o-rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electric actuators, electric measurement sensors, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, Pressure and optical sensors, showerhead having electronic sensors and signal transmitters, pumps with electronic sensors and signal transmitters, vacuum gauges with electronic sensors and signal transmitters, pipes with electronic sensors and signal transmitters, tubes for chemicals with sensors or electronic circuitry or signal transmitter, feed lines with sensors or electronic circuitry or signal transmitter, fans with electronic sensors and signal transmitters, power supplies electrical, power cables, doors with electronic sensors and signal transmitters, windows with electronic sensors and signal transmitters, and chamber walls with electronic sensors and signal transmitters all for semiconductor manufacturing machines; Electronic components, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o-rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electric actuators, electric measurement sensors, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, pressure and optical sensors, showerhead having electronic sensors and signal transmitters, pumps with electronic sensors and signal transmitters, vacuum gauges with electronic sensors and signal transmitters, pipes with electronic sensors and signal transmitters, tubes for chemicals with sensors or electronic circuitry or signal transmitter, feed lines with sensors or electronic circuitry or signal transmitter, fans with electronic sensors and signal transmitters, power supplies electrical, power cables, doors with electronic sensors and signal transmitters, windows with electronic sensors and signal transmitters, and chamber walls with electronic sensors and signal transmitters all for semiconductor substrates manufacturing machines; Electronic components, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electric actuators, electric measurement sensors, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, pressure and optical sensors, showerhead having electronic sensors and signal transmitters, pumps with electronic sensors and signal transmitters, vacuum gauges with electronic sensors and signal transmitters, pipes with electronic sensors and signal transmitters, tubes for chemicals with sensors or electronic circuitry or signal transmitter, feed lines with sensors or electronic circuitry or signal transmitter, fans with electronic sensors and signal transmitters, power supplies electrical, power cables, doors with electronic sensors and signal transmitters, windows with electronic sensors and signal transmitters, and chamber walls with electronic sensors and signal transmitters all for semiconductor wafer processing machines; Electronic components, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o-rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electric actuators, electric measurement sensors, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, pressure and optical sensors, showerhead having electronic sensors and signal transmitters, pumps with electronic sensors and signal transmitters, vacuum gauges with electronic sensors and signal transmitters, pipes with electronic sensors and signal transmitters, tubes for chemicals with sensors or electronic circuitry or signal transmitter, feed lines with sensors or electronic circuitry or signal transmitter, fans with electronic sensors and signal transmitters, power supplies electrical, power cables, doors with electronic sensors and signal transmitters, windows with electronic sensors and signal transmitters, and chamber walls with electronic sensors and signal transmitters all for semiconductor wafer processing equipment; Tools and equipment, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o-rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electric actuators, electric measurement sensors, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, Pressure and optical sensors, showerhead having electronic sensors and signal transmitters, pumps with electronic sensors and signal transmitters, vacuum gauges with electronic sensors and signal transmitters, pipes with electronic sensors and signal transmitters, tubes for chemicals with sensors or electronic circuitry or signal transmitter, feed lines with sensors or electronic circuitry or signal transmitter, fans with electronic sensors and signal transmitters, power supplies electrical, power cables, doors with electronic sensors and signal transmitters, windows with electronic sensors and signal transmitters, and chamber walls with electronic sensors and signal transmitters all for semiconductor manufacturing; Tools and equipment, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o-rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electric actuators, electric measurement sensors, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, Pressure and optical sensors, showerhead having electronic sensors and signal transmitters, pumps with electronic sensors and signal transmitters, vacuum gauges with electronic sensors and signal transmitters, pipes with electronic sensors and signal transmitters, tubes for chemicals with sensors or electronic circuitry or signal transmitter, feed lines with sensors or electronic circuitry or signal transmitter, fans with electronic sensors and signal transmitters, power supplies electrical, power cables, doors with electronic sensors and signal transmitters, windows with electronic sensors and signal transmitters, and chamber walls with electronic sensors and signal transmitters all for semiconductor wafer processing