Computer programs for detecting defects in the image pattern and design layout pattern of electronic circuits by optical, electron beam microscopes or scanning electron microscopes; computer programs and computer software for detecting defects in the image pattern and design layout pattern of electronic circuits by optical, electron beam microscopes or scanning electron microscopes; data processing programs for detecting defects in the image pattern and design layout pattern of electronic circuits by optical, electron beam microscopes or scanning electron microscopes

'beam':20,48,74 'circuit':16,44,70 'comput':1,26,29 'data':54 'defect':5,33,59 'design':11,39,65 'detect':4,32,58 'electron':15,19,24,43,47,52,69,73,78 'imag':8,36,62 'layout':12,40,66 'microscop':21,25,49,53,75,79 'optic':18,46,72 'pattern':9,13,37,41,63,67 'process':55 'program':2,27,56 'scan':23,51,77 'softwar':30

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