Wafer handling platform for semiconductor fabrication equipment, namely, wafer handling arms, wafer handling components, namely, wafer chucks and end-effectors, industrial robots and operating software sold as an integral component thereof, wafer aligners and wafer handling industrial robots for use in the field of semiconductor fabrication

'align':34 'arm':11 'chuck':17 'compon':14,31 'effector':21 'end':20 'end-effector':19 'equip':7 'fabric':6,47 'field':44 'handl':2,10,13,37 'industri':22,38 'integr':30 'name':8,15 'oper':25 'platform':3 'robot':23,39 'semiconductor':5,46 'softwar':26 'sold':27 'thereof':32 'use':41 'wafer':1,9,12,16,33,36

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