Low pressure chemical vapor deposition device; diffusion furnace; plasma enhanced chemical vapor deposition device; metal organic chemical vapor deposition devices- rapid thermal chemical vapor deposition device; high temperature chemical vapor deposition device; vapor phase epitaxy device; liquid phase epitaxy device; atmospheric pressure chemical vapor deposition device; semi-atmospheric chemical vapor deposition device,

'atmospher':41,49 'chemic':3,11,17,23,29,43,50 'deposit':5,13,19,25,31,45,52 'devic':6,14,20,26,32,36,40,46,53 'diffus':7 'enhanc':10 'epitaxi':35,39 'furnac':8 'high':27 'liquid':37 'low':1 'metal':15 'organ':16 'phase':34,38 'plasma':9 'pressur':2,42 'rapid':21 'semi':48 'semi-atmospher':47 'temperatur':28 'thermal':22 'vapor':4,12,18,24,30,33,44,51

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