EUV WAFER

Owner

Goods & Services

Apparatus and instruments for physics, namely, extreme ultraviolet (EUV) radiation-measurement wafers equipped with embedded EUV sensitive electronic sensors for monitoring wafer level EUV exposure and environmental conditions inside EUV semiconductor processing systems; Diagnostic equipment for research laboratory use, namely, EUV sensing wafers for measuring EUV radiation levels and chamber environmental characteristics during semiconductor wafer processing; Measures for measuring EUV radiation distribution and environmental characteristics within semiconductor process chambers; Computer software, recorded, for collecting, analyzing, and displaying EUV radiation and environmental characteristic data obtained during semiconductor processing; Computer software applications, downloadable, for collecting, analyzing, and displaying EUV radiation and environmental characteristic data obtained during semiconductor processing