Optical inspection apparatus for inspection of semiconductor materials, namely, semiconductor wafers, reticles, and photomasks; An optical metrology inspection system comprised of a light source, one or more cameras and sensors in communication with computer software and hardware; Electro-optical instruments for use in inspection and measurement of industrial components

'apparatus':3 'camera':28 'communic':32 'compon':50 'compris':20 'comput':34 'electro':39 'electro-opt':38 'hardwar':37 'industri':49 'inspect':2,5,18,45 'instrument':41 'light':23 'materi':8 'measur':47 'metrolog':17 'name':9 'one':25 'optic':1,16,40 'photomask':14 'reticl':12 'semiconductor':7,10 'sensor':30 'softwar':35 'sourc':24 'system':19 'use':43 'wafer':11

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