U.S. federal trademark · Serial No. 77273013 · Reg. No. 3498125
System for optical semiconductor wafer inspection comprising interchangeable modules, each module being designed for a separate type of optical semiconductor wafer inspection and comprised of brightfield and darkfield illuminators, substrate moving arms, computers, software for controlling the operation thereof and evaluates results therefrom
Source: USPTO federal trademark records. Informational only, not legal advice. Status and details may lag the live USPTO database.