Recorded computer software used for running, tracking, and providing feedback for on-tool metrology measurements; recorded computer software used for analysis of Big Data generated from semiconductor wafer processing and metrology, inspection, and review equipment; recorded computer software for creating machine learning algorithms for analysis of Big Data generated from semiconductor wafer processing and metrology, inspection, and review equipment

'algorithm':44 'analysi':22,46 'big':24,48 'comput':2,18,38 'creat':41 'data':25,49 'equip':36,60 'feedback':10 'generat':26,50 'inspect':33,57 'learn':43 'machin':42 'measur':16 'metrolog':15,32,56 'on-tool':12 'process':30,54 'provid':9 'record':1,17,37 'review':35,59 'run':6 'semiconductor':28,52 'softwar':3,19,39 'tool':14 'track':7 'use':4,20 'wafer':29,53

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