Controllers, namely, electric, mechanical and magnetic actuators that impact the layer properties of a thin film being sensed by measuring and detecting instruments for the purpose of power supply control, spatial gas and liquid distribution, heater systems, magnetic field strength distribution within a vacuum coating process

'actuat':7 'coat':45 'control':1,30 'detect':22 'distribut':35,41 'electr':3 'field':39 'film':16 'gas':32 'heater':36 'impact':9 'instrument':23 'layer':11 'liquid':34 'magnet':6,38 'measur':20 'mechan':4 'name':2 'power':28 'process':46 'properti':12 'purpos':26 'sens':18 'spatial':31 'strength':40 'suppli':29 'system':37 'thin':15 'vacuum':44 'within':42

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