SOFTWARE-DRIVEN CONTROL SYSTEMS, COMPRISED OF COMPUTER SOFTWARE AND HARDWARE, FOR CONTINUOUS ANALYSIS ENABLING PROCESS CONTROL AND FAULT FINDING, WHICH INTERACTS WITH VARIOUS SENSORS INSTALLED ON SEMICONDUCTOR MANUFACTURING EQUIPMENT, AND ALLOWS CENTRAL DATA COLLECTION, AND CONTROL OF THE MANUFACTURING FAB'S SUPPORT AND SEMICONDUCTOR EQUIPMENT

'allow':32 'analysi':14 'central':33 'collect':35 'compris':6 'comput':8 'continu':13 'control':4,17,37 'data':34 'driven':3 'enabl':15 'equip':30,46 'fab':41 'fault':19 'find':20 'hardwar':11 'instal':26 'interact':22 'manufactur':29,40 'process':16 'semiconductor':28,45 'sensor':25 'softwar':2,9 'software-driven':1 'support':43 'system':5 'various':24

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