Computer software, namely, a real-time semiconductor fabric-wide wafer tool software package for advanced process fault detection used to monitor information from tooling on the manufacturing line.; Computer software, namely, a real-time semiconductor fabric-wide wafer tool software package for advanced process fault detection used to monitor information from tooling on the manufacturing line.

'advanc':17,47 'comput':1,31 'detect':20,50 'fabric':10,40 'fabric-wid':9,39 'fault':19,49 'inform':24,54 'line':30,60 'manufactur':29,59 'monitor':23,53 'name':3,33 'packag':15,45 'process':18,48 'real':6,36 'real-tim':5,35 'semiconductor':8,38 'softwar':2,14,32,44 'time':7,37 'tool':13,26,43,56 'use':21,51 'wafer':12,42 'wide':11,41

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