Recorded computer simulation software for modeling semiconductor manufacturing; Recorded computer software for virtual prototyping of three-dimensional models for the design of semiconductor devices; Recorded computer software for designing and manufacturing semiconductors and micro-electro- mechanical systems (MEMS)

'comput':2,10,27 'design':22,30 'devic':25 'dimension':18 'electro':37 'manufactur':8,32 'mechan':38 'mem':40 'micro':36 'micro-electro':35 'model':6,19 'prototyp':14 'record':1,9,26 'semiconductor':7,24,33 'simul':3 'softwar':4,11,28 'system':39 'three':17 'three-dimension':16 'virtual':13

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