modular lithographic process systems comprising machines for handling and manipulating substrates, namely silicon wafers and photomasks, and machines to coat, develop, etch, strip and clean such substrates, and environmentally safe chambers and clean-room chambers for lithographic process systems, sold as a unit, and parts thereof

'chamber':31,36 'clean':25,34 'clean-room':33 'coat':20 'compris':5 'develop':21 'environment':29 'etch':22 'handl':8 'lithograph':2,38 'machin':6,18 'manipul':10 'modular':1 'name':12 'part':46 'photomask':16 'process':3,39 'room':35 'safe':30 'silicon':13 'sold':41 'strip':23 'substrat':11,27 'system':4,40 'thereof':47 'unit':44 'wafer':14

electronic controls for modular lithographic process systems

'control':2 'electron':1 'lithograph':5 'modular':4 'process':6 'system':7

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