U.S. federal trademark · Serial No. 78413144
Semiconductor wafer processing equipment and operational software, and components sold as a unit therewith, namely-- epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, and chemical mechanical polishers; all for the processing and production of semiconductor substrates, thin films, silicon discs and wafers
Source: USPTO federal trademark records. Informational only, not legal advice. Status and details may lag the live USPTO database.