Linear encoders; encoders; distance measuring apparatus and instruments; measuring apparatus and instruments for use in detecting displacement and controlling position of machinery, namely, semiconductor/LCD steppers, semiconductor/LCD scanners, electron beam lithography system comprised of electron tubes and electron multipliers for use in producing semiconductors; measuring and control devices, namely, linear encoders and encoders, electronic controllers and probes for testing semiconductors for use in measuring displacement and controlling position of machine tools

'apparatus':6,10 'beam':29 'compris':32 'control':19,46,54,66 'detect':16 'devic':47 'displac':17,64 'distanc':4 'electron':28,34,37,53 'encod':2,3,50,52 'instrument':8,12 'linear':1,49 'lithographi':30 'machin':69 'machineri':22 'measur':5,9,44,63 'multipli':38 'name':23,48 'posit':20,67 'probe':56 'produc':42 'scanner':27 'semiconductor':43,59 'semiconductor/lcd':24,26 'stepper':25 'system':31 'test':58 'tool':70 'tube':35 'use':14,40,61

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