Chemical vapor deposition apparatus for use in research; Electric or electronic sensors for deposition reactors; Electronic components, namely, piezoelectric switches; Industrial calibration sensors; Laboratory equipment, namely, crucibles; Sensor cards for deposition reactors; Sensor chips for scientific use; Sensors for measuring deposited mass for thin film monitors and controllers in deposition reactors, not for medical use; Thermocouples

'apparatus':4 'calibr':22 'card':29 'chemic':1 'chip':34 'compon':17 'control':48 'crucibl':27 'deposit':3,14,31,41,50 'electr':9 'electron':11,16 'equip':25 'film':45 'industri':21 'laboratori':24 'mass':42 'measur':40 'medic':54 'monitor':46 'name':18,26 'piezoelectr':19 'reactor':15,32,51 'research':8 'scientif':36 'sensor':12,23,28,33,38 'switch':20 'thermocoupl':56 'thin':44 'use':6,37,55 'vapor':2

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